| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9830120 | Journal of Crystal Growth | 2005 | 12 Pages |
Abstract
The paper overviews research activities at the “Research Center for Ultra Precision Science & Technology of Osaka University”. It describes the motivation of the research, and the physical concepts of new ultraprecision machining methods; i.e. elastic emission machining (EEM), plasma chemical vaporization machining (PCVM), atmospheric pressure plasma chemical vapor deposition (PCVD), and hydroxyl electrochemical machining (H-ECM), and some application examples achieved by utilizing above methods are introduced.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Yuzo Mori, Kazuya Yamamura, Katsuyoshi Endo, Kazuto Yamauchi, Kiyoshi Yasutake, Hidekazu Goto, Hiroaki Kakiuchi, Yasuhisa Sano, Hidekazu Mimura,