Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9830237 | Journal of Crystal Growth | 2005 | 6 Pages |
Abstract
Gallium-doped zinc oxide (ZnO:Ga) films were prepared on glass substrates by r.f. magnetron sputtering at low substrate temperature. Structural, electrical and optical properties of the ZnO:Ga films were investigated in terms of the preparation conditions. The obtained films were polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (0 0 2) crystallographic direction. The transmittance of the ZnO:Ga films in the visible range was over 85%. The lowest resistivity and sheet resistance for the ZnO:Ga films were about 3.9Ã10â4 Ω cm and 4.6 Ω/â¡, respectively.
Related Topics
Physical Sciences and Engineering
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Condensed Matter Physics
Authors
Xuhu Yu, Jin Ma, Feng Ji, Yuheng Wang, Xijian Zhang, Chuanfu Cheng, Honglei Ma,