Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9830240 | Journal of Crystal Growth | 2005 | 6 Pages |
Abstract
ZnO films grown by low-pressure metal-organic chemical vapor deposition using diethylzinc (DEZn) and dimethylzinc (DMZn) as zinc precursors exhibited the different growth mechanisms and properties. The film grown with DMZn was covered by typical three-dimensional islands, while the film grown with DEZn shows a quasi-two-dimensional lateral growth features of large hexagonal grains and a smooth surface. Raman scattering measurements investigated the existence of high content of carbon and hydrogen in the DMZn grown films, due to which the photoluminescence properties are consequently degraded greatly with the distinct deep-level emissions. In contrast, ZnO grown with DEZn exhibits the superior structural and optical properties, as well as a lower carbon impurity concentration.
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Authors
Jiandong Ye, Shulin Gu, Shunming Zhu, Songmin Liu, Wei Liu, Xin Zhou, Liqun Hu, Rong Zhang, Yi Shi, Youdou Zheng,