B ion implantation effects on L10 chemical ordering of FePt thin films

B ion implantation effects on L10 chemical ordering of FePt thin films are investigated. Using ion implantation equipment, B+ ions were implanted into the as-deposited disordered FePt thin films followed by a rapid thermal annealing (RTA). Magnetic properties, surface roughness and crystalline structures of the samples were examined before and after RTA. It was found that by B+ ion implantation, FePt thin films showed larger coercivity and smoother surface after RTA. X-ray diffraction measurements have revealed that the lattice parameters were changed by B+ ion implantation. The B+ ion implanted sample showed elongated a-axis and lower c/a ratio after RTA.