Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9834680 | Journal of Magnetism and Magnetic Materials | 2005 | 4 Pages |
Abstract
We have investigated in situ stress evolution for (Co82Cr18)87Pt13 /Ti alloy film in an ultrahigh vacuum (UHV) chamber equipped with a highly sensitive optical deflection-detecting system. A very large compressive stress is developed at the very beginning of CoCrPt alloy deposition, and it turns into a smaller tensile stress at about 5-Ã
CoCrPt thickness. After 20-Ã
CoCrPt deposition, the tensile stress again turns back to compressive stress. The microstructural studies at the each transition thickness region revealed that microstructural changes play a major role for the observed stress variation at the initial growth stage.
Related Topics
Physical Sciences and Engineering
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Condensed Matter Physics
Authors
Mi-Young Im, Jong-Ryul Jeong, Sung-Chul Shin,