Article ID Journal Published Year Pages File Type
9834680 Journal of Magnetism and Magnetic Materials 2005 4 Pages PDF
Abstract
We have investigated in situ stress evolution for (Co82Cr18)87Pt13 /Ti alloy film in an ultrahigh vacuum (UHV) chamber equipped with a highly sensitive optical deflection-detecting system. A very large compressive stress is developed at the very beginning of CoCrPt alloy deposition, and it turns into a smaller tensile stress at about 5-Å CoCrPt thickness. After 20-Å CoCrPt deposition, the tensile stress again turns back to compressive stress. The microstructural studies at the each transition thickness region revealed that microstructural changes play a major role for the observed stress variation at the initial growth stage.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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