| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9844848 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2005 | 6 Pages |
Abstract
Contact or proximity aligners or 1:1 projection aligners are conventionally used for patterning large-area devices like silicon strip detectors for high-energy particle detection. Reduction steppers offer a far better pattern fidelity and an increased productivity but a very limited field size. This paper describes methods to overcome the field size limitations to pattern large-area position-sensitive particle detectors automatically and accurately with a 5:1 reduction stepper.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Kari Leinonen,