Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9952729 | Sensors and Actuators A: Physical | 2018 | 8 Pages |
Abstract
This paper presents a low voltage, and large stroke Lorentz-force actuated continuous deformable polymer mirror for adaptive optics. A 5 à 5 actuator array clamped on the rigid mounting rail are formed from single crystal silicon flexible serpentine springs on either side of a rigid crossbar containing a narrow contact pillar. For the mirror, an epoxy-based SU-8 photoresist is used, which enables low voltage operation combined with Lorentz actuator. The Lorentz DM were tested and demonstrated a large 40 μm deformation at 9 mA actuation current, and needing <1 V operation. This Lorentz DM would operate 2 kHz frequency with 40 μm stroke, which can be suitable for large deformation adaptive optics application.
Related Topics
Physical Sciences and Engineering
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Electrochemistry
Authors
Byoungyoul Park, Elnaz Afsharipour, Dwayne Chrusch, Cyrus Shafai, David Andersen, Greg Burley,