Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
9952760 | Sensors and Actuators A: Physical | 2018 | 29 Pages |
Abstract
This paper proposes a fast-converged reduced-order model for small vibrations of electrostatically actuated rectangular microplates around their deformed states. On this foundation, one-mode analysis method and thus closed-form analytical expressions are developed for the fundamental resonant frequency analysis. Numerical multi-mode analysis is conducted to investigate the convergence. It is concluded that the one-mode analysis method can give a converged solution, which demonstrates that the proposed model has a faster convergence than previous models where multi modes are needed. The directly calculated resonant frequencies by the closed-form expressions are in good agreement with the numerical results by FEM simulations with less than 5% variation before pull-in. Parametric study shows the closed-form expressions are applicable to the cases in which the thickness is less than 1/20 of the length and width under a nominal length to width ratio of 1â¼2.5, and the gap distance is less than or equal to the thickness of the microplate. Additionally, a kind of electrostatic configurations based on multilayer microplates, capacitive micromachined ultrasonic transducers (CMUTs), were used to experimentally validate the closed-form expressions and good agreement was observed.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Zhikang Li, Libo Zhao, Zhuangde Jiang, Yihe Zhao, Jie Li, Jiawang Zhang, Yulong Zhao, Liwei Lin,