Article ID Journal Published Year Pages File Type
9952768 Sensors and Actuators A: Physical 2018 10 Pages PDF
Abstract
In this study, a pressure sensor based on the photo elastic effect in a waveguide in z-cut LiNbO3 diaphragm has been made. In the waveguide, polarization of light changes due to the external pressure. It has been shown that z-cut LiNbO3 provides more pressure sensitivity than other commonly used materials such as silicon and glass.
Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
Authors
, ,