Fabrication and electrochemical characterization of interdigitated nanoelectrode arrays

Interdigitated nanoelectrode arrays with controlled electrode bandwidth and gap geometries ranging from 30 nm to 1 μm were fabricated on glass substrates by a planar process involving high resolution electron beam lithography and lift-off, and their characteristic electrochemical responses to an aqueous ferrocene derivative solution were examined using fundamental electrochemical techniques. Despite the comparatively large electrode area of electrode arrays containing 10 bands to a single band electrode, quasi-steady-state currents with high current density were obtained at a slow potential sweep rate in cyclic voltammograms of ferrocene derivative since the lateral dimension of the nanoelectrode arrays was considerably less than the scale of the diffusion layer of redox species. Additionally, it was demonstrated that the electrode thickness influenced limiting currents of voltammograms in the case of nanoelectrode arrays. In generation-collection mode experiments, furthermore, a collection efficiency as high as ∼99% was attained by 100 nm wide electrode arrays with a gap dimension of 30 nm.