| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10282131 | Applied Energy | 2005 | 11 Pages |
Abstract
Fluoro-nitric acid used in the semiconductor industry as a washing agent is of high purity and high concentration (fluoric acid: 23.3%, nitric acid: 16.6%). It is recovered using separation and control in the semiconductor industry. A technology for utilizing this acid byproduct as a pickling solution for stainless steel sheets in the steel industry was developed. The results of a Life-Cycle Assessment study showed that a cascade of 10 tons of acid byproducts reduces energy consumption by 4.0 tons in crude oil conversion value, CO2 emissions by 4.3 tons, and sludge generation by 24.8 tons.
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Authors
Hiroshi Uesugi, Tomohiro Suginaka, Masashi Fujiwara, Yuki Kuwauchi, Masahiko Hirao,