Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10400975 | Diamond and Related Materials | 2005 | 4 Pages |
Abstract
X-ray microdiffraction is a non-destructive technique that allows for depth-resolved, strain measurements with submicron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechancial Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2 Ã 1017 H+/cm2 protons. Preliminary results indicate that a measurable strain, on the order of 10â 3, was introduced into the film near the End of Range (EOR) region of the protons.
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
R.L. Newton, J.L. Davidson, G.E. Ice, W. Liu,