Nanoindentation study on nanomechanical characteristics of a-CN film deposited by shielded arc ion plating

Mechanical properties of the a-CN films including elastic modulus (Er), hardness (H), elastic recovery (R), contact stiffness (S) and deformation energies were measured by a nanoindentation system. We also evaluated wear resistant behavior of the layered a-CN films in nanometer scale by the same nanoindentation system. All the a-CN films, irrespective of Vb, showed better wear-resistance characteristics than sapphire and quartz. The a-CN (− 300 V)/Si sample showed the best wear-resistance, although its hardness was lower than the a-CN (− 300 V)/a-C (− 100 V)/Si. The wear resistant characteristic of the films can be understood by considering the other mechanical properties including that of R, hardness-to-elastic modulus ratio (H / Er), and elastic deformation energy (We) obtained from the nanoindentation. These various nanomechanical properties certainly govern the wear-resistance of the film.