Field emission characteristics of Diamond-like Carbon (DLC) films prepared using a Magnetron Sputter-type Negative Ion Source (MSNIS)

The field emission characteristics of Diamond-like Carbon (DLC) films prepared using a MSNIS were studied. Due to Negative Electron Affinity (NEA), the high hardness, high thermal conductivity and chemical inertness, DLC films are considered as good electron emitters for Field Emission Displays. However, the very smooth DLC films showed poor field emission characteristics regardless of their sp3 contents or density. After reviewing the emitted spots using Atomic Force Microscope (AFM), a metal-diamond-vacuum triple-junction type emission model was tried. Triple-junction type patterns were fabricated using KrF excimer-laser drilling method. Without fabricating spindt type tips, stable field emission was observed with the low turn on voltages (∼2 V/μm). The FE (Field emission) characteristics such as I-V characteristic curves, turn on voltages, and emission lifetime data were obtained using a diode type FE measurement system. Overall results show significantly enhanced performance of field emission characteristics can be achieved at the laser-patterned DLC films.