Raman microscopic characterization of proton-irradiated polycrystalline diamond films

The microstructural effects of irradiating polycrystalline diamond films with protons was examined. The dosages ranged from 1015 to 1017 H+/cm2. Scanning electron microscopy (SEM) and Raman microscopy were used to examine the ion implantation related changes as a function of depth. The results indicate that single crystal diamond and polycrystalline diamond exhibit similar behavior with respect to predicted vs. actual ion implant range, microstructural damage, and ion behavior both along the implant path and near the stopping location of the ions.