Charge carrier lifetime in DLC films

Diamond-like carbon (DLC) layers deposited at room temperature in 13.56 MHz radio-frequency methane (CH4) plasma have been studied. The results of transient currents for DLC thin films are reported. The carrier's lifetime was determined based on the transient current analysis for the surface and bulk recombinations: trs=0.3 ms, trv=0.11 ms. These values seem to be relatively high for structures of this type. The diffusion length for DLC films L*=0.67×10−4 cm. Other parameters such as the diffusion coefficient D*=4×10−5 cm2/s and surface recombination rate S=0.37 cm/s are exceptionally small here.