Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10401270 | Diamond and Related Materials | 2005 | 5 Pages |
Abstract
Amorphous carbon nitride (a-C:N) films were successfully synthesized on silicon using a 90°-bend magnetic filtered cathodic arc plasma (FCAP) system. ESCA analysis demonstrated that the N/C ratios reached 1.08. Many investigations on photoluminescence (PL) spectra of diamondlike carbon films have been performed, but cathodoluminescence (CL) spectra have seldom been discussed. This work investigated a-C:N films using the CL spectra at 300 K. This work presents CL spectra of a-C:N films obtained at 1.5-3.5 eV and verifies luminescence from the a-C:N films in the visible region. The most prominent luminescence in the CL spectra from the a-C:N films has two peaks centered â¼2.67 eV (blue light) and â¼1.91 eV (red light), but the a-C film yielded only the band at â¼1.91 eV. These optical emissions are intrinsic and extrinsic to the a-C:N film and are sensitive to the content of nitrogen.
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Authors
W.J. Hsieh, C.C. Lin, U.S. Chen, Y.S. Chang, H.C. Shih,