Gas response control through structural and chemical modification of metal oxide films: state of the art and approaches

In this review the structural and physical-chemical properties of nanoscaled metal oxide films (SnO2 and In2O3), aimed for solid state chemical sensors were analyzed. It has been shown that structural factor even for nanoscaled materials is complicated conception. One has to consider not only size, but also such a parameters as crystallite shape; nanoscopic structure; crystallographic orientation of nanocrystallites planes, forming gas sensing surface; film agglomeration; phase composition; surface architecture. The methods suitable for control of these structural and physical-chemical parameters have been discussed. Results, mainly obtained during study of both SnO2 and In2O3 thin films deposited by spray pyrolysis have been used for showing an opportunity of structural engineering of metal oxides for optimization of gas sensing characteristics.