Article ID Journal Published Year Pages File Type
10410427 Sensors and Actuators B: Chemical 2005 5 Pages PDF
Abstract
Sol-gel processed Al2O3 thick film template has been tested for the first time to fabricate a trace moisture sensor. The device consists of a thick film nano porous γ-Al2O3 film, electrodes coated by silver palladium (AgPd) conductive past on both sides of the film forming a parallel plate capacitor. A high change in capacitance was observed with increasing ppmV moisture level from 0 to 100 ppmV. The results show that sol-gel processed monoliths are promising materials for capacitive type trace moisture sensor.
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Physical Sciences and Engineering Chemistry Analytical Chemistry
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