Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10410427 | Sensors and Actuators B: Chemical | 2005 | 5 Pages |
Abstract
Sol-gel processed Al2O3 thick film template has been tested for the first time to fabricate a trace moisture sensor. The device consists of a thick film nano porous γ-Al2O3 film, electrodes coated by silver palladium (AgPd) conductive past on both sides of the film forming a parallel plate capacitor. A high change in capacitance was observed with increasing ppmV moisture level from 0 to 100 ppmV. The results show that sol-gel processed monoliths are promising materials for capacitive type trace moisture sensor.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Kalyan Kumar Mistry, Debdulal Saha, Kamalendu Sengupta,