Fabrication of a two-dimensional pH image sensor using a charge transfer technique

In this paper, a pH image sensor, which is capable of measuring two-dimensional (2-D) distributions and dynamic images of various chemical reactions in real time, is presented. The novel pH imaging sensor developed in this work use a charge transfer technique and with them it is possible to form images of variations in chemical reactions. A prototype pH image sensor was successfully fabricated using complimentary metal-oxide semiconductor (CMOS) circuit process technology and was used to measure two-dimensional distributions of various chemical reactions in moving images at 30 frames/s. It is expected that this sensor can be used for novel applications such as in the medical and biochemistry fields.