A novel fused sensor for photo- and ion-sensing

A novel sensor device, comprising of fused photo-sensors and ion-sensors, is proposed. We describe how a prototype device was successfully fabricated using a CMOS process. In the proposed device, a photo-sensor and an ion-sensor are fused in the same pixel, enabling the photo-signal and the ion concentration density to be detected simultaneously in the same sensing area. Therefore, the relationship between light distribution and ion distribution can be clarified by using this novel sensor array. The dependence of the photo-sensing region on the power of the input-light was measured. It was found that the output signal is proportional to the input-light power, and is not influenced by the pH value of the solution. The dependence of the output signal on the pH was also investigated, and it was found that it was not influenced by the light intensity.