Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10410993 | Sensors and Actuators B: Chemical | 2005 | 6 Pages |
Abstract
Sputtered films of titania have been explored for sensing of carbon monoxide (CO) at 550 °C. Film thickness was varied from 24 to 1000 nm by varying the sputtering time. The films were amorphous as prepared and converted to rutile upon thermal treatment. Highest sensor sensitivity, as measured by the resistance change of the film upon exposure to CO was noted for the â¼240 nm film, and characterization focused on this film. Microstructure studies using electron microscopy show that the film was dense, with grain sizes of rutile of â¼20 nm. Atomic force microscopy showed considerable surface roughness. The â¼240 nm sputtered films exhibited higher sensitivity (factor of 3) as compared to optimized porous films made with commercially available anatase particles.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Prabir K. Dutta, Marla Frank, Gary W. Hunter, Michael George,