Structurally characterized carboxylic acid modified zirconium alkoxides for the production of zirconium oxide thin films

A series of carboxylic acid (H-ORc) were reacted with [Zr(μ-OPri)(OPri)3(H-OPri)]2 (1) or the novel Zr3(μ3-O)(μ3-ONep)(μ-ONep)3(ONep)6 (7, shown) which yielded the novel family of compounds 2-6 (OPri) and 8-11 (ONep).The highest density thin films of ZrO2 were found for the larger nuclearity species (3).