| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10630975 | Journal of Non-Crystalline Solids | 2012 | 8 Pages |
Abstract
⺠We prepared SiOx and SiNx films by PECVD and investigated their structures and properties. ⺠Compared with SiOx, SiNx films exhibit better optical and mechanical properties. ⺠SiNx films are more suitable to be used in VOx-based infrared microbolometers. ⺠Micro-Raman spectroscopy exhibits advantage in characterizing amorphous thin films.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Xiangdong Xu, Liangchang Zhang, Long Huang, Qiong He, Taijun Fan, Zhuo Yang, Yadong Jiang, Zhanping Li,