| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10630979 | Journal of Non-Crystalline Solids | 2012 | 5 Pages |
Abstract
⺠a-CNx films having high N content were formed by our original technique using the decomposition of BrCN with ECR plasmas of He, Ne, and Ar. ⺠Local structures and compositions of the films were studied by C-K NEXAFS and XPS. They were formed to vary with the kind of rare gases. ⺠A cyclazine-like two-dimensional structure is proposed to explain these variations.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Akira Wada, Katsuaki Koshimura, Masahito Niibe, Hidetoshi Saitoh, Kazuhiro Kanda, Haruhiko Ito,