Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10645067 | Journal of Nuclear Materials | 2011 | 4 Pages |
Abstract
We report measurements of total C sputtering yields for room temperature a-C:D thin films irrradiated by equal velocity D+, D2+, and D3+ beams in the energy range 30-200Â eV/D. The C sputtering yields were deduced from crater volumes determined from 2-D ellipsometry scans, the known thin film C density, and the measured total number of incident D particles during the beam exposures. While our results for incident D3+ ions are in good agreement with mass loss measurements for D3+, our results for D2+ and D+ incident ions fall systematically below the D3+ results, indicating a significant molecular size effect. A molecular size effect has been previously found for CD4 production during low energy impact of same velocity D+, D2+, and D3+ ions incident on ATJ graphite, which, however, was smaller in magnitude. The ellipsometry-based total C sputtering yields are compared with recently deduced total C production yields based on a mass spectroscopy approach.
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Authors
F.W. Meyer, P.R. Harris, H. Zhang, W. Jacob, T. Schwarz-Selinger, U. von Toussaint,