| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1171670 | Analytica Chimica Acta | 2006 | 5 Pages |
Abstract
In2O3âx thin films with a thickness of 100-990Â nm were grown by dc magnetron sputtering. Their structural, electrical and ozone sensing properties were analyzed. Structural investigations carried out by electron probe micro analysis, secondary ion mass spectrometry and atomic force microscopy showed a strong correlation between stoichiometry, surface topology and gas sensitivity. Moreover, the electrical conductivity of In2O3âx thin films exhibited a change of over six orders of magnitude during photoreduction with ultraviolet light and subsequent oxidation in ozone atmosphere at room temperature.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
M. Suchea, N. Katsarakis, S. Christoulakis, M. Katharakis, T. Kitsopoulos, G. Kiriakidis,