| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1335530 | Polyhedron | 2007 | 8 Pages |
Hexanuclear oxo titanium(IV) isopropoxide carboxylates, of the general formula [Ti6O6(OPri)6(O2CR)6] (R = But (1), CH2But (2)) and [Ti6O6(OPri)6(O2CC(CH3)2Et)6] · 0.5(C7H8) (3), have been synthesized as polycrystalline powders in order to study their thermal properties and usability as TiO2 CVD precursors. Analysis of thermogravimetric and variable temperature (VT-IR) data shows that the thermal stability of the synthesized complexes decreases as follows 3 > 2 > 1. The composition of the vapors formed during the thermolysis of 1–3 were qualitatively analysed with VT-IR methods and mass spectrometry (MS-EI). According to obtained results, the decomposition of 1 and 2 proceeds with a partial decomposition and the formation of a volatile and stable titanium species, sufficient for their transport in vapors. The formation of volatile titanium-containing derivatives is an important factor that decides the application of 1 and 2 as precursors in CVD experiments. The high stability of 3 causes the thermal decomposition of this complex to be observed just above 573 K, and volatile titanium-containing derivatives were not detected in vapors. These results indicate that 3 could not be used as a precursor in CVD processes.
Graphical abstractHexanuclear oxo titanium(IV) isopropoxide carboxylates, of the general formula [Ti6O6(OPri)6(O2CR)6] (R = But (1), CH2But (2)) and [Ti6O6(OPri)6(O2CC(CH3)2Et)6] · 0.5(C7H8) (3), have been synthesized as polycrystalline powders in order to study their thermal properties and usability as TiO2 CVD precursors. Analysis of thermogravimetric and variable temperature (VT-IR) data shows that the thermal stability of the synthesized complexes decreases as follows 3 > 2 > 1. Composition of vapors formed during thermolysis of 1–3 were qualitatively analysed with VT-IR methods and mass spectrometry (MS-EI).Figure optionsDownload full-size imageDownload as PowerPoint slide
