| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1338733 | Polyhedron | 2007 | 6 Pages |
Abstract
The APCVD reaction of WCl6 with ethanol was examined to deposit tungsten oxide on gas sensor substrates. Deposited films, which were WO3−x, displayed a different morphology than those seen previously for CVD tungsten oxide. The gas-sensing properties of the deposited films were examined.
Graphical abstractThe APCVD reaction of WCl6 with ethanol was examined to deposit tungsten oxide on gas sensor substrates. Deposited films, which were WO3−x, displayed a different morphology than those seen previously for CVD tungsten oxide. The gas-sensing properties of the deposited films were examined.Figure optionsDownload full-size imageDownload as PowerPoint slide
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Physical Sciences and Engineering
Chemistry
Inorganic Chemistry
Authors
Sobia Ashraf, Russell Binions, Christopher S. Blackman, Ivan P. Parkin,