Nanostructure formation on metal-chalcogenide surface using electron beam irradiation

In this letter, we demonstrate a method to form a nano-structured pattern on metal-chalcogenide sandwich like structures, using electron beam (EB) irradiation. After pointing EB at surface, we observed nano-dots and nano-lines formation on metal-chalcogenide (AgS, AgSe, CuS, CuSe) surface, considerably made of Ag or Cu, depending on metal in compound (Ag or Cu). This technique is based on the solid-state electrochemical reaction between EB and surface. Our results demonstrate repeatable metal structures with dimension of nanometers. As this process is carried out with scanning electron microscope (SEM) and does not require wet chemicals, it has potential for use as a simple metal patterning technique to fabricate functional structures and devices.

Research Highlights► AgS, AgSe, CuS and CuSe metal-chalcogenide layers used as a substrate. ► Surface smoothness depends on chemical composition of layers. ► Focused electron beam irradiation enables growth of nano-sized metal particles. ► The size and place of the particles is controlled and prove-out process.