| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1481697 | Journal of Non-Crystalline Solids | 2012 | 4 Pages |
Abstract
⺠High quality thin-film solar cell for single-chamber process with in-situ treatment. ⺠No significant B and P cross-contamination for a 15' evacuation cycle. ⺠p-layer deposition strongly reduces P cross-contamination for a-Si:H and μc-Si:H.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
J. Woerdenweber, T. Merdzhanova, T. Zimmermann, A.J. Flikweert, H. Stiebig, W. Beyer, A. Gordijn,