| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1482478 | Journal of Non-Crystalline Solids | 2011 | 5 Pages |
Abstract
⺠The ZnO films were prepared at room temperature by the unbalanced magnetron sputtering system with various RF powers and film thicknesses. ⺠The UBM sputter with an electromagnet for ZnO films had high growth rate. ⺠The electrical properties of ZnO films were improved with the increasing RF power and film thickness due to the enhancement of the crystallinity in ZnO films.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Yong Seob Park,