Article ID Journal Published Year Pages File Type
1483071 Journal of Non-Crystalline Solids 2008 4 Pages PDF
Abstract

We demonstrate a method of capillary force reduction during wet processing of three-dimensional structures photo-polymerized in resist by femtosecond pulses. A rinse in water was added as the final step of wet processing for recovery of free-standing photo-polymerized structures with feature sizes of ∼100 nm. The hydrophobicity of resist was utilized for reduction of the capillary drainage force. We show a possibility of holographical recording of a three-dimensional woodpile structure, which has a good permeability and can be fabricated by the proposed modified wet processing.

Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
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