Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1483071 | Journal of Non-Crystalline Solids | 2008 | 4 Pages |
Abstract
We demonstrate a method of capillary force reduction during wet processing of three-dimensional structures photo-polymerized in resist by femtosecond pulses. A rinse in water was added as the final step of wet processing for recovery of free-standing photo-polymerized structures with feature sizes of ∼100 nm. The hydrophobicity of resist was utilized for reduction of the capillary drainage force. We show a possibility of holographical recording of a three-dimensional woodpile structure, which has a good permeability and can be fabricated by the proposed modified wet processing.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa,