Deuterium retention in mixed C–W–D films co-deposited in magnetron discharge in deuterium

Deuterium retention in C–D and C–W–D mixed films deposited in a magnetron discharge in deuterium was studied. The deuterium content in the C–D films was in the range D/C = 0.65–0.75 for grounded substrates and 0.45–0.6 if a bias of −60 V was applied. The deuterium content in the C–W–D films was in the range of D/(C + W) = 0.2–0.4 without strong dependence on the C/W ratio (in the range of 0.7–10) and the substrate potential (in the range from 0 to −60 V). Deuterium release from the C–W–D films was observed at lower temperatures than that from the C–D films.