| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1566443 | Journal of Nuclear Materials | 2012 | 9 Pages |
Abstract
⺠Tungsten-doped amorphous carbon films were eroded in oxygen plasmas. ⺠Initial C removal rate decreases with increasing W concentration. ⺠Erosion rate decreases with plasma exposure duration due to W accumulation at the surface. ⺠W-rich layer at the surface is porous WO3. ⺠W erosion only if ion energy higher than threshold for physical sputtering.
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Nuclear Energy and Engineering
Authors
P. Wang, W. Jacob, M. Balden, A. Manhard, T. Schwarz-Selinger,