Structural, Optical and Electrical Characterization of Fe3O4 Thin Films Prepared using PVD Magnetron Sputtering (RF)

Magnetite being half metallic is one of a commonly studied spintronic material. An account of experimental work is presented for studying the structural, optical and electrical properties of magnetite (Fe3O4) thin films of the order of 50 to 100 nm deposited on glass substrate by using radio frequency magnetron sputtering technique by using Fe3O4 target. Structural properties were studied by using x-ray diffraction while the optical and electrical properties were examined by ellipsometry and two probe methods, respectively. For each sample, Argon inflow rate was kept at 50, 75, 100 sccm against a power of 100, 150, 200 Watts respectively. Sputtered films exhibited inverse spinel Fe3O4 as the dominant phase. After annealing, the films show improved structural properties. The ellipsometry results show good transmission this result is that the iron oxide thin films can be used in opto-electronic devices.