| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1654706 | Materials Letters | 2005 | 4 Pages |
Abstract
This paper is concerned with the effect of material discontinuities, such as porosity, on the modulus of elasticity and attempts to simulate the effects of porosity in polysilicon using a finite element model. The proposed Young's modulus model is applied to the simulation of a polysilicon MEMS gyro. When the compensated Young's modulus is used in this simulation, we can reduce the difference between the simulation and the actual experimental result.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Dong-chan Lee, Hyeun-seok Choi, Chang-soo Han, Hee-jun Jeong,