| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1673631 | Thin Solid Films | 2007 | 6 Pages |
Abstract
CaCu3Ti4O12 (CCTO) thin films with various thicknesses were prepared by a sol–gel multiple coating processes on Pt/Ti/SiO2/Si substrates. Microstructures and surface morphologies of CCTO thin films were analyzed by grazing incident X-ray diffractometer (GIXRD) and scanning electron microscope (SEM), respectively. The correlation between the thickness and electrical properties of CCTO films was investigated. The dielectric constants of CCTO films decreased with increasing film thickness (coating cycle). Both the dielectric constant of CCTO films and interlayer are calculated. Possible mechanisms are explored to explain the thickness dependence of the dielectric constant of CCTO films.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Li-Chun Chang, Dai-Ying Lee, Chia-Cheng Ho, Bi-Shiou Chiou,