| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1674582 | Thin Solid Films | 2008 | 4 Pages |
Abstract
Transparent conductive oxide (TCO) films of polycrystalline Nb-doped TiO2 (TNO) were fabricated by post-annealing reactively sputtered amorphous films under H2 atmosphere. Carrier transport properties of the H2-annealed films were found to be strongly dependent on substrate temperature Ts and oxygen content in sputtering atmosphere. A minimum resistivity (ρ) of 9.5 × 10− 4 Ω cm and an average visible transmittance of ∼ 75% were obtained at Ts = RT and oxygen content of 10%. This ρ value is of the same order as those of epitaxial TNO films, indicating that polycrystalline TNO has sufficient potential as a practical TCO suitable for large-area applications.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Naoomi Yamada, Taro Hitosugi, Ngoc Lam Huong Hoang, Yutaka Furubayashi, Yasushi Hirose, Seiji Konuma, Toshihiro Shimada, Tetsuya Hasegawa,