Response of anisotropic thermoelastic micro-beam resonators under dynamic loads

In this paper, the dynamic response of homogeneous, transversely isotropic, thermoelastic micro-beam resonators subjected to time-varying transverse loads has been investigated in the context of generalised theory of thermoelasticity. The micro-beam is modeled based on Euler–Bernoulli beam theory. The beam is assumed to be at clamped–clamped conditions at its axial ends. The analytical solution has been obtained by using the Laplace transform technique in the time domain. The inversion of the transformed solution has been carried out by using calculus of residues. The analytical expressions for deflection obtained in the physical domain have been computed numerically for a silicon micro-beam with the help of MATLAB software. The numerically analysed results for deflection of clamped–clamped thermoelastic silicon (Si) micro-beam with length, time and frequency ratio due to acting dynamic loads have been presented graphically. The present model may be used in microelectromechanical applications such as relay switches, frequency filters, mass flow sensors, accelerometers and resonators.