Article ID Journal Published Year Pages File Type
1759198 Ultrasonics 2013 8 Pages PDF
Abstract
► The bulk acoustic wave generation by a surface acoustic wave is studied numerically. ► The conversion occurs due to a grating area created on the surface of the substrate. ► The substrate is a half-infinite anisotropic half-space without piezoeffect (silicon). ► The finite element method is used.
Keywords
Related Topics
Physical Sciences and Engineering Physics and Astronomy Acoustics and Ultrasonics
Preview
Mutual conversion of bulk and surface acoustic waves in gratings of finite length on half-infinite substrates. II. FE analysis of bulk wave generation
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