2D strain measurement in sub-10 nm SiGe layer with dark-field electron holography

•We can measure 2D strain in sub-10 nm SiGe layer using dark-field electron holography.•The strain distribution is clearly uniform and smooth over the whole SiGe layer.•The measured results were compared to the X-ray diffraction (XRD) results.

In this paper, we carried out the two-dimensional (2D) strain measurement in sub-10 nm SiGe layer; images were obtained by dark-field electron holography (DFEH). This technique is based on transmission electron microscopy (TEM), in which dark-field holograms were obtained from a (400) diffraction spot. The measured results were compared to the X-ray diffraction (XRD) results in terms of the strain value and the depth of strain distribution in a very thin SiGe layer. Subsequently, we were able to successfully analyze the 2D strain maps along the [100] growth direction of the nanoscale SiGe region. The strain was measured and found to be in the range of 1.8–2.4%. The strain precision was estimated at 2.5 × 10−3. As a result, the DFEH technique is truly useful for measuring 2D strain maps in very thin SiGe layers with nanometer resolution and high precision.