Investigation of laterally single-diffused metal oxide semiconductor (LSMOS) field effect transistor

•The charge plasma (CP) concept is implemented for LDMOS.•The CP concept is an alternative way of implementing an LDMOS with lower thermal budget.•The LDMOS implemented with CP has a similar performance as that of a conventionally implemented LDMOS.

We propose a distinct approach to implement a laterally single diffused metal-oxide-semiconductor (LSMOS) FET with only one impurity doped p-n junction. In the LSMOS, a single p-n junction is first created using lateral dopant diffusion. The channel is formed in the p region of the p-n junction and the n region acts as the drift region. Two distinct metals of different work function are used to form the “n+” source/drain regions and “p+” body contact using the charge plasma concept. We demonstrate that the LSMOS is similar in performance to a laterally double diffused metal-oxide-semiconductor (LDMOS) although it has only one impurity doped p-n junction. The LSMOS exhibits a breakdown voltage of ∼50.0 V, an average ON-resistance of 48.7 mΩ-mm2 and a peak transconductance of 53.6 μS/μm similar to that of a comparable LDMOS.