Improvement of solar cell efficiency by applying Si3N4 nanopattern on glass substrate

•Si3N4 nanopattern and planarized Si3N4 nanopattern were fabricated on glass.•The Si3N4 and planarized Si3N4 nanopattern had similar optical properties.•Morphology of the active layer was changed by the Si3N4 nanopattern.•Absorption of solar cell was increased due to the Si3N4 nanopattern.•Efficiency of the solar cell with the Si3N4 nanopattern substrate increased by 24.2%.

A cylindrical Si3N4 nanopattern whose heights was 200 nm was fabricated on a glass substrate, and an aluminum-doped zinc oxide (AZO) layer was grown on the nanopatterned glass substrate. The nanopattern was applied to an amorphous silicon solar cell in order to increase the light-scattering effect, thus enhancing the efficiency of the solar cell. The reflectance of the solar cell on the Si3N4 nanopattern decreased and its absorption increased. Compared to a flat substrate, the short-circuit current density (Jsc) and conversion efficiency of a solar cell on the Si3N4 nanopatterned substrate were improved by 17.9% and 24.2%, respectively, as determined from solar simulator measurements.