Article ID Journal Published Year Pages File Type
1786564 Current Applied Physics 2012 5 Pages PDF
Abstract

0.85Bi0.5Na0.5TiO3–0.15Bi0.5K0.5TiO3 (BNKT15) lead-free thin films were prepared on Pt(111)/TiO2/SiO2/Si(100) substrates by the chemical solution deposition method. BNKT15 are MPB composition in the Bi0.5Na0.5TiO3–Bi0.5K0.5TiO3 (BNT–BKT) system. The maximum piezoelectric coefficient (d33,f) value of BNKT15 thin film is approximately 75 pm/V, which is comparable to that of polycrystalline PZT thin films. These results suggest that BNKT15 thin film can be used as an alternative for PZT films in piezoelectric micro-electromechanical systems.

► 0.85Bi0.5Na0.5TiO3-0.15Bi0.5K0.5TiO3 (BNKT15) lead-free thin films were prepared. ► BNKT15 are MPB composition in the BNKT system. ► Piezoelectric coefficient (d33,f) value of BNKT15 thin film is 75 pm/V. ► d33,f value of BNKT15 film is comparable to that of polycrystalline PZT thin films. ► BNKT15 thin film can be used as an alternative for PZT thin films.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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