Cyclodextrin-based reactive porogen for nanoporous ultra-low dielectrics

We prepared ultralow dielectrics with remarkably high mechanical strengths (E ∼ 8.1 GPa and H ∼ 1.2 GPa). The reactivity of porogens was critical to enhanced mechanical properties of ULK. In the case of non-reactive porogens the mechanical properties of nanoporous ultralow dielectrics dramatically decreased with reduction in dielectric constant. However, reactive CD was very effective in the preparation of ULK for the next generation semiconductors.

► We examined the effect of porogen reactivity on the properties of dielectrics. ► Cyclodextrin was functionalized as a reactive porogen with alkoxy silane groups. ► Reactivity of porogens was critical to the enhanced mechanical properties. ► But the reactivity did not affect the dielectrical properties. ► Reactive CD produced the utmost modulus and hardness of nanoporous dielectrics.