Article ID Journal Published Year Pages File Type
1787012 Current Applied Physics 2012 7 Pages PDF
Abstract

An optic-based X-ray tomography system of a high spatial resolution using a conventional X-ray tube was proposed. The system had several X-ray optics: multilayer mirror for monochromatic X-ray, capillary optic for focusing X-ray onto a sample, and objective zone plate. The X-ray tomography system was designed for obtaining a spatial resolution of 100 nm. Design parameters for each optic were determined and optimized by ray tracing in considering X-ray intensity and reflectivity. The X-ray tomography system with a spatial resolution of 100 nm will provide a good inspect tool in bio-medical field and semiconductor applications.

► The design of X-ray tomography system which can obtain a spatial resolution of 100 nm by X-ray optics is presented. ► The X-ray tomography system is designed for using a conventional X-ray tube. ► Design parameters for several X-ray optics are determined by ray tracing.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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