| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1787021 | Current Applied Physics | 2012 | 5 Pages |
Abstract
⺠Taguchi's method was a feasibility tool to study the performance of the TiO2 deposition process. ⺠RF power has the greatest effect on MB photodecomposition. ⺠The RF power increases will result in an improvement of film crystalline structure. ⺠Increasing sputtering power contributed to increased crystallite size and higher surface roughness for the Ti thin films.
Related Topics
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Authors
D.Y. Chen, C.C. Tsao, C.Y. Hsu,