Article ID Journal Published Year Pages File Type
1787306 Current Applied Physics 2007 7 Pages PDF
Abstract

A program is modeled to describe nitriding depth by a new mixing laser and plasma beams nitriding (LPN) technique. The model extends the transport of ions in matter (TRIM) program by adding temperature and energy factors into the energy function. The nitriding depths and nitrogen distribution in substrate were calculated by Monte Carlo program. There is a good agreement between calculation and experiment results at different laser energy intensities, scanning velocities and nitrogen ion energies respectively. Moreover, the nitriding process diagrams by LPN technique are shown from calculation results.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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