Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1787995 | Current Applied Physics | 2006 | 4 Pages |
Abstract
We report on the progress that has been made on the realisation of narrow spectrum photonic crystal filters operating in the communications band. The development of a process for the deposition of silicon–silicon dioxide super-lattices using RF reactive sputtering is described. The use of reactive sputtering of silicon dioxide from a silicon target enables a much higher deposition rate than could be achieved using a SiO2 target. The characteristics of these films are shown to closely match the widely accepted values for silicon dioxide over a wide range of wavelengths. The cross-sectional SEM micrograph of a super-lattice deposited in this manner is presented which shows clearly the alternating layers with well-defined interfaces.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
E. Boyd, R.J. Blaikie,